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ALD Al2O3
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ALD process: schematic of one cycle of Al2O3 ALD growth. The ...
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Schematic representation of one cycle of Al2O3 by ther…
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Schematic representation of one cycle of Al2O3 by thermal ALD and ...
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(a) O 1 s and (b) Al 2p XPS spectra of AL…
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3D modeling of rotary-type ALD equipment and Al2O…
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a) Growth of Al2O3 film by the ALD p…
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An STS study on the growth of ALD Al 2 O 3 …
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(a) Schematic diagram of the influence of an ALD …
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(a) Schematic diagram of the influence of an ALD …
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3 Schematic of one ALD cycle for AL2O3 depositions using TMA and H2O as ...
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ALD cycle for growth of Al2O3 using TMA as precu…
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AFM image of the deposited Al2O3 th…
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Growth mechanism of ALD‐Al2O3 thin films. | Download Scientific Dia…
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Schematic of protective Al2O3 ALD coating on anode layer. | Downloa…
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It was found that reduction of the ALD Al2O3 deposition temperature to ...
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Surface-Activated ALD For Room-Temperature Bonding of Al2O3
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(a) Schematic of the ALD deposition of Al2O3 with …
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(Color online) Chemical bonds of ALD-Al2O3 before and after steam ...
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(Color online) Chemical bonds of ALD-Al2O3 befo…
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Figure 4 from Plasma and thermal ALD of Al2O3 in a commercial 2…
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Electrical properties of low-temperature Al2O3 ALD films grown using ...
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Summary of the ALD Al2O3 thin film deposition parameters and the film ...
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(a) Schematic diagram of the influence of an ALD-Al2O3 …
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AFM images of the 100 cycles ALD-Al2O3 dep…
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Atomic Layer Deposition (ALD) Al2O3 growth occurs by pulsing H2O and ...
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Schematic diagram of the protection mechanism of Al2O3 ALD coating on ...
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Figure 2 from Experimental Characterization of ALD Grow…
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(a) The experimental absorptance spectra o…
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Cathodoluminescence spectra of ALD-Al2O3 o…
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The absorptance spectra of the only ALD-Al2O3 coate…
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